期刊名称:International Journal on Smart Sensing and Intelligent Systems
印刷版ISSN:1178-5608
出版年度:2012
卷号:5
期号:3
页码:592-605
出版社:Massey University
摘要:MoO3 thin films have been prepared by a simple spray pyrolysis technique at substrate temperature 250oC. The structure and morphology of thin films are characterized by X-ray powder diffraction (XRD), scanning electron microscopy and UV-vis spectroscopy. The gas sensing properties of MoO3 thin film is studied at gas concentration 400 ppm and working temperature of 100–400 oC. It was found that the sensitivity depended on the working temperatures and also H2S gas concentration. The results show that the MoO3 thin film can be used to fabricate high performance H2S gas sensors.ie