期刊名称：Journal of Modelling and Simulation of Systems
印刷版ISSN：1737-9377
电子版ISSN：1737-9385
出版年度：2010
卷号：1
期号：2
出版社：HyperSciences Publisher
摘要：The design, modeling, and simulation of a new type of comb drive capacitive MEMS bending strain sensor for spinal fusion progression mo nitoring was recently reported. In the present work, five models with different dimensions were studied using different gaps and overlapping areas. FEA wasperformed using MEMS simulation software, CoventorWare.2008, and the results obtained were verified with mathematical analysis and experimental data. Of the models tested, Model 3 gave the best performance, sho wing high nominal capacitance (40.5pF) and sensitivity (528). The results highlight the optimal design for spinal fusion monitoring application
