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文章基本信息

  • 标题:Microstructural impact on electromigration: A TCAD study
  • 本地全文:下载
  • 作者:Ceric Hajdin ; de Orio Lacerda Roberto ; Zisser Wolfhard H.
  • 期刊名称:Facta universitatis - series: Electronics and Energetics
  • 印刷版ISSN:0353-3670
  • 电子版ISSN:2217-5997
  • 出版年度:2014
  • 卷号:27
  • 期号:1
  • 页码:1-11
  • DOI:10.2298/FUEE1401001C
  • 出版社:University of Niš
  • 摘要:

    Current electromigration models used for simulation and analysis of interconnect reliability lack the appropriate description of metal microstructure and consequently have a very limited predictive capability. Therefore, the main objective of our work was obtaining more sophisticated electromigration models. The problem is addressed through a combination of different levels of atomistic modeling and already available continuum level macroscopic models. A novel method for an ab initio calculation of the effective valence for electromigration is presented and its application on the analysis of EM behavior is demonstrated. Additionally, a simple analytical model for the early electromigration lifetime is obtained. We have shown that its application gives a reasonable estimate for the early electromigration failures including the effect of microstructure.

  • 关键词:electromigration; interconnect; reliability; physical modeling; simulation
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