摘要：The
multi-element components of low alloy steel were quantified by using
laser-induced breakdown spectroscopy (LIBS) in deep UV. The Nd:YAG pulsed laser
was used to produce plasma. The spectrum was simultaneously
obtained by deep UV spectrometer. This paper studied the influence of
experiment parameters on LIBS spectral intensity, such as delay, energy of
laser, and the distance between the focusing lens and the surface of the sample.
With the optimal expe- riment parameters, the
characteristic lines of C, Ni, Si, Cr and Cu contained in low alloy steel were
selected for quantit- ative analysis and the calibration curves of these elements were obtained. The linear correlation coefficient was good. Using the calibration curves to quantitative
analysis for the sample 05-d, and the relative error of analytical results is
less than 10% for most elements.
关键词：Laser-Induced Breakdown Spectroscopy; Plasma; Quantitative Analysis; Deep UV
