摘要：The electromechanical coupled forced response of the microplate subjected to electrostatic force is investigated. Using electromechanical coupled dynamic equations and the mode superposition method, the forced responses of the microplate to voltage excitation and load excitation are analyzed, respectively. Based on this, the coupled forced responses of the micrplate to voltage and load excitations are obtained. Beat vibration caused by the coupled response is investigated and the condition that the beat vibration occurs is determined.
