摘要：The electrochemical micromanufacturing process, as a key micromanufacturing technology, plays an important role in diverse industries. In this paper, polydimethylsiloxane (PDMS) is employed as a mask in the electrochemical micromanufacture of microstructures because of its chemical resistance, low cost, flexibility, and high molding capability. A new method for fabricating a PDMS micro through-holes mask is proposed. In this method, a thin resist film is employed to enhance the adhesion between the substrate and the SU-8 pillar array which is used as a mold. A vacuum-aided process is used to inject the PDMS gel into the SU-8 mold and the PDMS micro through-holes mask can be peeled off from the SU-8 mold when the gel is cured. Experiments were conducted to verify the feasibility of the proposed approach and PDMS microholes of various shapes were obtained. The PDMS mask can then be successfully applied in the electrochemical micromanufacturing process to generate microstructures and microdimple and embossment arrays have been successfully demonstrated. Furthermore, the PDMS mask can be reused, as it is not damaged during the manufacturing process.
