摘要：A compact linear positioning stage using one microgripper and one piezoelectric stack is presented based on the parasitic motion principle. Characteristics of the linear positioning stage along the positive y-axis and the negative y-axis are measured and compared with each other. Experimental results indicate that the linear positioning stage has features of the large motion range, various movement velocities and stepping displacement, and forward and reverse movements. Meanwhile, the positioning stage has good resolution and enough load capacity. Possible reasons leading to nonlinearity and velocity difference between forward and reverse movements are discussed. Research results in this paper will make applications of the parasitic motion principle more flexible.
