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  • 标题:The influence of technology and switching parameters on resistive switching behavior of Pt/HfO2/TiN MIM structures
  • 本地全文:下载
  • 作者:Paskaleva Albena ; Hudec Boris ; Jančovič Peter
  • 期刊名称:Facta universitatis - series: Electronics and Energetics
  • 印刷版ISSN:0353-3670
  • 电子版ISSN:2217-5997
  • 出版年度:2014
  • 卷号:27
  • 期号:4
  • 页码:621-630
  • DOI:10.2298/FUEE1404621P
  • 出版社:University of Niš
  • 摘要:

    Resistive switching (RS) effects in Pt/HfO2/TiN metal-insulator-metal (MIM) capacitors have been investigated in dependence on the TiN bottom electrode engineering, deposition process, switching conditions and dielectric thickness. It is found that RS ratio depends strongly on the amount of oxygen introduced on TiN surface during interface engineering. In some structures a full recovery of conductive filament is observed within more than 100 switching cycles. RS effects are discussed in terms of different energy needed to dissociate O ions in structures with different TiN electrode treatment.

  • 关键词:resistive switching; Pt/HfO2/TiN structures; interface engineering; atomic layer deposition
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