出版社：Defence Scientific Information & Documentation Centre
摘要：Microelectromechanical systems (MEMS) have found applications in defence as well as in civilian sectors. Analysis of MEMS devices require complex 3-D meshes due to the presence of mechanical and electrostatic energy domains. On the other hand, meshless methods do not require the generation of mesh and perform the computational analysis by just sprinkling the points covering the domain. In this paper, meshless analysis of MEMS switches based on reproducing kernel particle method is reported. Numerical results for the static analysis of the switch are compared with the simulated results obtained using INTELLISUITE MEMS CAD tool. Defence Science Journal, 2009, 59(6), pp.622-626 , DOI:http://dx.doi.org/10.14429/dsj.59.1567
