摘要：This paper aims at portable high-precision surface defect detection equipment designed based on laser non-contact measurement, though a CCD camera and dual word line semiconductor lasers can achieve the measurement of small surface in a close distance. Resultant data is sent to PC via wireless transmission mode to achieve the separation of detection module with terminal display processing module. The detection system with a small-volume structure which can achieve fast and accurate scanning can be used to achieve the device workpiece surface defect measurement under various complex occasions. It is able to achieve real-time display of the measurement results through MATLAB graphical user interface. High measuring accuracy and reliability of the system is verified by experiments, and the depth measurement accuracy can reach 40μm. The results provide an important basis for the detection of surface blemish and improve product design and processing quality.
